Laboratory LIMEMS

Striving to establish a microelectronics culture, and the adequate facilities in the country, the Innovation in Microelectromechanical Systems Laboratory (LIMEMs) was founded in 2009. It is the consequence of a joint venture by the ministries of Economics and Economic Development of the State of Puebla and the INAOE.

It operates a Class 10 clean room, with additional Class 100 and Class 1000 areas for services, covering an area of 800 m2.




General Objective

The main goal of this laboratory is to provide a world-class facility for the fabrication of semiconductor devices, integrated circuits (ICs) and microelectromechanical systems (MEMs) to satisfy the needs of the regional industry, while also forming highly-prepared human resources in these fields. This laboratory is a stepping stone to further technological research to enhance the Triple Helix for the benefit of the country, specially focusing on high-technology industries.



  • Development of a 0.8 mm BiCMOS process based on low dielectric constants and reduced parasitic components.
  • Development of a complete MEMs process.
  • Study of nano-structured materials to be incorporated in conventional silicon technologies.
  • Development of printed circuit boards (PCBs) for personal computers capable of operating at up to 70 GHz clock frequencies.
  • Study of novel high dielectric constant materials.
  • Study of different orientation crystalline substrates to improve mobility.
  • Development of optoelectronic devices based on silicon.
  • Development of faster interconnects, with for PCBs and ICs.
  • Development of novel semiconductor devices.
  • Development of Computer Aided Design (CAD) platforms to simulate processes and circuits.
  • Forming graduate students in state-of-the-arts fields in electronics.
  • Establishing academic and technological networks with counterparts worldwide.